Experimental Facilities

and

Shared Facilities Available to Group Members

C.L.Chien Lab Facilities On-line Signup

Fabrication and Processing

Sputter deposition 
    • Four-source small chamber system 
    • Four-source new chamber system 
    • Six-source large chamber system with plasma and ion milling guns 
    • Ten-source AJA system with e-beam evaporation chamber

        Nova 600 Dual Beam focused ion beam

        Lambda-Physik pulsed laser deposition system 

    Tubular furnaces (up to 1500°C) 

    Centorr tri-arc furnace 

    Spex 8000 high-energy ball mill 

    Perkin-Elmer UHV deposition system 

    Optical and electron beam lithography 

X-ray Characterization

MRD dual beam x-ray diffraction system

MPD 4-circle x-ray diffraction system 

Laue x-ray diffractometer 

X-ray photoelectron spectrometer 

Electron Microscopy Facilities

Amray 1860 FEG high resolution SEM

Zeiss EVO 50 SEM

Philips 420ST TEM

300 keV HRTEM with FEG and GIF 

Surface Characterization Facilities

Tencor Thin film profilometer

Digital Instruments multimode AFM/MFM

STM tip etching and coating set-up

Perkin-Elmer LEED Auger surface analytical system

Measurement of Physical Properties

Quantum Design SQUID magnetometer

DMS model 10 vector vibrating sample magnetometer

DMS 1660 cryostat vibrating sample magnetometer

Magneto-transport properties

AC susceptometer

Point contact spectroscopy

 

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CLC Lab at JHU, all rights reserved. Last update by L. Y. Zhu in October, 2007
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